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View up-to-date information on Advanced Micro-Fabrication Equipment Inc patents, including inventor and filing insights.
Patent Trends
| Publication Identifier | Document Type | Title | Classification-CPC | Publication Date |
|---|---|---|---|---|
| US11830747B2 | Grant | Plasma reactor having a function of tuning low frequency rf power distribution | H01J37/32155; H01J37/32174; H01J37/32577; H01J37/32706; H01L21/67069; H01L21/67109; H01L21/6719; H01L21/6831; H05H1/46; H05H1/4652; H05H1/466; H05H2242/20 | November 28, 2023 |
| CN116718827A | Application | Sine wave amplitude detection circuit | Y02B70/10 | September 08, 2023 |
| CN219626626U | Grant | Electrostatic chuck and plasma processing apparatus | September 01, 2023 | |
| CN219626589U | Grant | Plasma edge etching equipment | Y02P70/50 | September 01, 2023 |
| CN116618371A | Application | Semiconductor manufacturing equipment part processing method | B08B13/00; B08B3/08; B08B3/12; G01N1/28; G01N27/626 | August 22, 2023 |
Top Inventors by Filings (Count by publication)
| Name | Count |
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