Advanced Micro-Fabrication Equipment Inc: Patents

View up-to-date information on Advanced Micro-Fabrication Equipment Inc patents, including inventor and filing insights.

Patent Trends

Publication Identifier	Document Type	Title	Classification-CPC	Publication Date
US20220246406A1	Application	LOWER ELECTRODE ASSEMBLY AND PLASMA PROCESSING DEVICE	H01J2237/334; H01J37/32082; H01J37/32495; H01J37/32568; H01J37/32715; H01L21/6833	August 04, 2022
US11387084B2	Grant	Uniform pumping dual-station vacuum processor	H01J37/32211; H01J37/32513; H01J37/32633; H01J37/32733; H01J37/32834; H01J37/32899; H01L21/31116	July 12, 2022
KR1020220092797A	Application	PLASMA REACTOR	H01J2237/334; H01J37/32091; H01J37/32183; H01J37/32623; H01J37/32642; H01L21/3065	July 04, 2022
US20220208521A1	Application	PLASMA REACTOR	H01J37/32091; H01J37/32183; H01J37/32642; H01L21/3065	June 30, 2022
US11373843B2	Grant	Capacitively coupled plasma etching apparatus	H01J37/32091; H01J37/32532; H01L21/67069	June 28, 2022

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