ASM International NV - Company Profile

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ASM International NV: Patents

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View up-to-date information on ASM International NV patents, including inventor and filing insights.

Patent Trends

Publication Identifier Document Type Title Classification-CPC Publication Date
US20230395370A1 Application Substrate processing method H01L21/02167; H01L21/02274; H01L21/0228; H01L21/02304 December 07, 2023
US20230393569A1 Application Diagnostic tool having human-machine interface, and method for diagnosis of programmable logic controller G05B19/058; G05B2219/14006; G05B2223/06; G05B23/0224 December 07, 2023
US20230393477A1 Application High-temperature methods of forming photoresist underlayer and systems for forming same C23C16/325; C23C16/401; C23C16/405; C23C16/407; C23C16/45536; G03F7/11; H01L21/0273 December 07, 2023
US20230395372A1 Application Method and system for forming patterned structures using multiple patterning process C23C16/04; C23C16/50; H01J2237/332; H01J37/32165; H01J37/3244; H01L21/02274; H01L21/0228; H01L21/0234 December 07, 2023
US20230392278A1 Application Substrate supporting plate, apparatus including the substrate supporting plate, and method of using same C23C16/4404; C23C16/4409; C23C16/4412; C23C16/45525; C23C16/4583; C23C16/5096; C25D11/022; C25D11/04; H01J37/3244; H01J37/32477; H01J37/32715; H01L21/6719; H01L21/68735; H01L21/68757 December 07, 2023
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Top Inventors by Filings (Count by publication)

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