ASML Holding NV (ASML) is a developer, manufacturer and marketer of advanced semiconductor equipment systems. The company’s offerings include lithography related products, metrology tools, inspection systems and refurbished systems. It serves industries including automotive, smart industry, autonomous robotics, predictive healthcare, global connectivity, smart cities, mixed reality, wearables, artificial intelligence, smart home, and energy transition.

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ASML's R&D arm focuses on innovating across its entire portfolio to provide critical, differentiated, and cost-effective solutions in semiconductor manufacturing. The company's key areas of focus include the development of advanced lithography systems, metrology and inspection systems, computational lithography, and system and process control software. The company also emphasizes AI integration, sustainability, and collaboration with partners to drive innovation and operational excellence. The R&D units of ASML include the Research department and the Development & Engineering (D&E) department. The Research department is responsible for filling the 'innovation funnel' with new ideas, evaluating them for proof of concept, and passing them on to D&E for development and testing. The D&E department has over 16,000 employees, focuses on executing the technology roadmap, working on advanced optical and mechatronic modules, application software, and operating systems. The D&E department focuses on executing the technology roadmap, working on advanced optical and mechatronic modules, application software, and operating systems. ASML has multiple R&D centers located in Veldhoven, the Netherlands; Wilton, United States; Silicon Valley, United States; San Diego, United States; Beijing; Shenzhen; and Taiwan. As of December 2025, ASML operated seven R&D facilities located in the Netherlands, the US, Taiwan, South Korea, and China. In FY2025, the company incurred expenses of EUR4,698.8 million, which as a percentage of revenue, stood at 14.4%.