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Brooks Automation Inc: Patents

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View up-to-date information on Brooks Automation Inc patents, including inventor and filing insights.

Patent Trends

Publication Identifier Document Type Title Classification-CPC Publication Date
US20210305076A1 Application ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS H01L21/68; H01L21/68707 30 Sep 2021
US20210296142A1 Application LOAD PORT MODULE H01L21/67017; H01L21/67173; H01L21/67201; H01L21/67259; H01L21/67379; H01L21/67393; H01L21/67772; H01L21/67775; B65G49/068 23 Sep 2021
US20210296142A1 Application LOAD PORT MODULE H01L21/67017; H01L21/67379; H01L21/67772; H01L21/67775; B65G47/90 23 Sep 2021
US20210291357A1 Application SUBSTRATE TRANSPORT APPARATUS WITH INDEPENDENT ACCESSORY FEEDTHROUGH B25J15/0052; B25J17/0283; B25J9/042; B25J9/06; B25J9/106; B25J9/107; B25J9/1615; H01L21/67265; H01L21/67742; H01L21/67766; H01L21/6838; H01L21/68707 23 Sep 2021
GB2593141A Application Vessel gripper G01N2035/0406; G01N2035/0493; G01N35/0099; B01L99/00; B25J13/082; B25J15/0028; B25J15/0033; B25J15/0038; B25J15/0226; B25J15/10; B65G47/90; B65G1/0464; B65G1/137 22 Sep 2021
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