Mr. Karl Lamprecht has been the Chairman of the company since May 2021. Prior to this, he serves as the President and Chief Executive Officer of the ZEISS Group since 2020. He also served as the Head of the Semiconductor Manufacturing Technology business group; and President and Chief Executive Officer of Carl Zeiss SMT GmbH in 2017. He served as the Member of Semiconductor Manufacturing Technology business group and Head of the Semiconductor Manufacturing Optics strategic business unit in 2015; Head of the Laser Optics Strategic business unit and Managing Director of Carl Zeiss Laser Optics GmbH in 2008; Vice President of Strategic Business Development at Carl Zeiss Semiconductor Manufacturing Technology AG in 2005; and Investment Director at AdAstra Venture Consult GmbH, Munich in 2002.

Mr. Markus Weber has been the President and Chief Executive Officer of the company since January 2022. Prior to this, he served as the member of Executive Board of Carl Zeiss AG in 2019. Mr. Weber served as the Head of the Research Microscopy Solutions SBU in 2015 and Head of Corporate Research and Technology at ZEISS Group in 2010. Previously, he served as the Head of Advanced Development in the Microsurgery business area of the Medical Technology business group in 2009. He served as Research Associate at ZEISS Semiconductor Manufacturing Technology in 2002.

Mr. Justus Felix Wehmer has been the Chief Financial Officer of the company since October 2018. Prior to this, he also served as the Co-Head of the Microscopy division and Managing Director of Carl Zeiss Microscopy GmbH. Previously, he served as the Managing Director of Carl Zeiss Jena GmbH and Vice President Finance and Strategy and General Manager at NXP Semiconductors Germany GmbH.