Ebara Corp - Company Profile

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Ebara Corp: Patents

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View up-to-date information on Ebara Corp patents, including inventor and filing insights.

Publication Identifier	Document Type	Title	Classification-CPC	Publication Date
US20230390898A1	Application	Substrate clamping apparatus	B25B5/16	December 07, 2023
US20230393085A1	Application	Method of evaluating primary optical system of electron beam observation device, evaluation device used therefor, and method of manufacturing same	G01N2223/20; G01N2223/418; G01N23/2251	December 07, 2023
EP4056858A4	Search Report	Pumpengehäuse und pumpvorrichtung	F04D13/06; F04D29/426; F04D29/4293; F05D2240/126; F05D2260/941	December 06, 2023
US11837482B2	Grant	Substrate holding and rotation mechanism and substrate processing apparatus	H01L21/67346; H01L21/68721; H01L21/68785	December 05, 2023
US11833551B2	Grant	Pre-wet module, deaerated liquid circulation system, and pre-wet method	C23C18/163; C23C18/18; B08B3/022; H01L21/68764	December 05, 2023

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