Mr. Kazuo Ushida has been the Chairman of the company since 2019. Prior to this, he served as the President and Representative Director, Officer in Charge of Business Development Division, Optical Engineering Division and Research & Development Division of the company. Previously, he served as the President and Representative Director of Overseeing Medical Business Development Division and Business Development Division. He also served as the Representative Director, Member of the Board & Senior Executive Vice President of the company. Earlier, Mr. Ushida also worked as the Managing Director and Member of the Board & Executive Vice President, President of Precision Equipment Company.

Mr. Toshikazu Umatate has been the Director, President, and Chief Executive Officer of the company since 2021. Currently, he also serves as the Chief Technology Officer, Officer in charge of Design Center and Research and Development Division and Advanced Technology Research & Development Division of the company. Prior to this, he served as the Senior Vice President, General Manager of Semiconductor Lithography Business Unit of the company from 2018 to 2019. Previously, he worked as the Senior Vice President, General Manager of Semiconductor Lithography Business Unit of the company from 2014 to 2018.

Mr. Muneaki Tokunari has been the Director and Executive Vice President, Chief Financial Officer of the company since 2021. He is also a Officer of Internal Audit Department, Corporate Sustainability Department, Finance & Accounting Division and IT Solutions Division of the company. Previously, he served as the Senior Managing Director and Chief Financial Officer of MUFG Bank, Ltd., The Bank of Tokyo-Mitsubishi UFJ, Ltd., Director, Managing Executive Officer and Group Chief Financial Officer of Mitsubishi UFJ Financial Group, Inc. and Managing Director and Chief Financial Officer of The Bank of Tokyo-Mitsubishi UFJ, Ltd. Prior to this, he also served as the Executive Officer, Managing Executive Officer and General Manager of Corporate Planning Division of the company.

Mr. Takumi Odajima has been the Chief Administrative Officer, Director, Executive Vice President, Chief Risk Management Officer, General Manager - Group Governance and Administration Division, Officer in charge of Information Security Department and Legal and Intellectual Property Divisions of the company since 2021. Previously, he served as the Senior Vice President, General Manager and Deputy General Manager of the Human Resources Division of the company. Prior to that, he served as the Corporate Vice President of the Corporate Strategy Division of the company. Earlier, he also served as the General manager of the Planning headquarters and Precision Equipment divisions of the company.