Sumco Corp - Company Profile
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View up-to-date information on Sumco Corp patents, including inventor and filing insights.
Patent Trends
| Publication Identifier | Document Type | Title | Classification-CPC | Publication Date |
|---|---|---|---|---|
| US20230395423A1 | Application | Method for producing support substrate for bonded wafer, and support substrate for bonded wafer | C23C16/24; C23C16/56; H01L21/76254 | December 07, 2023 |
| US20230381834A1 | Application | Method of cleaning pipe of single-wafer processing wafer cleaning apparatus | B08B2209/032; B08B9/0328; H01L21/67023 | November 30, 2023 |
| US20230384077A1 | Application | Carrier measurement device, carrier measurement method, and carrier management method | B24B37/005; G01B5/06; H01L21/67288 | November 30, 2023 |
| DE112016005815B4 | Grant | Waferpolierverfahren und -vorrichtung | B24B37/005; B24B37/015; B24B37/042; B24B37/08; B24B37/10; B24B37/107; B24B37/20; B24B49/14; B24B49/16; H01L21/304; H01L21/31051; H01L21/32115; H01L21/67092; H01L21/67248; H01L21/68764 | November 30, 2023 |
| JP7388333B2 | Grant | 単結晶引き上げ装置のワイヤー振れ止め機構 | C30B15/00; C30B29/06; F16H19/043 | November 29, 2023 |
Top Inventors by Filings (Count by publication)
| Name | Count |
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