Tokyo Electron Ltd - Company Profile
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View up-to-date information on Tokyo Electron Ltd patents, including inventor and filing insights.
Patent Trends
| Publication Identifier | Document Type | Title | Classification-CPC | Publication Date |
|---|---|---|---|---|
| US20230395411A1 | Application | Data collection system, data collection apparatus, data collection method, and data collection program | G01N21/9501; G05B19/401; G05B19/41875; G05B2219/45031; H01L21/02; H01L21/67288; H05H1/0006 | December 07, 2023 |
| US20230395368A1 | Application | Substrate processing method and substrate processing apparatus | H01L21/0214; H01L21/02233; H01L21/31116 | December 07, 2023 |
| US20230390810A1 | Application | Cleaning method and processing apparatus | B08B5/00; B08B7/0064 | December 07, 2023 |
| US20230395380A1 | Application | Processing apparatus for forming a coating film on a substrate having a camera and a mirror member | B05D1/005; G01N21/9503; G03F7/168; G03F7/20; G03F7/2028; G03F7/26; G03F7/70425; G06T7/0008; G06T7/60; H01L21/0274; H01L21/6715; H01L21/67173; H01L21/67253; H01L21/67288; H01L21/681; H01L21/68714; H01L22/12; H01L22/20 | December 07, 2023 |
| US20230392258A1 | Application | Film forming method and film forming apparatus | C23C16/32; C23C16/45517; C23C16/52 | December 07, 2023 |
Top Inventors by Filings (Count by publication)
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