Mr. Timothy M. Archer has been the Chief Executive Officer, President, and a Director of the company since December 2018. He also serves on the International Board of Directors for SEMI. Prior to this, he served as the President and Chief Operating officer of the company from January 2018 to November 2018. Previously, he served as an Executive Vice President and Chief Operating officer of the company. Mr. Archer held various technology development roles at Novellus Systems Inc for 18 years including Chief Operating Officer from January 2011 to June 2012; Executive Vice President of Worldwide Sales, Marketing, and Customer Satisfaction from September 2009 to January 2011; and Executive Vice President of the PECVD and Electrofill business units from November 2008 to September 2009. He also served as the Senior Director of Technology at Novellus Systems Japan from 1999 to 2001, and Senior Director of Technology of the Electrofill business unit from April 2001 to April 2002 at Novellus. Earlier, he started his career with Tektronix Inc in 1989.

Mr. Doug R. Bettinger has been the Chief Financial Officer and an Executive Vice President of the company since 2013. He also serves on the Board of Directors of Lattice Semiconductor Corp. Prior to this, he served as the Chief Financial Officer and Senior Vice President of Avago Technologies from 2008 to 2013; Vice President of Finance and Corporate Controller of Xilinx Inc from 2007 to 2008. Previously, Mr. Bettinger served as the Chief Financial Officer of 24/7 Customer from 2004 to 2007. Earlier, he served in several senior-level finance positions including Corporate Planning and Reporting Controller and Malaysia site operations controller at Intel Corporation from 1993 to 2004.

Mr. Seshasayee Varadarajan has been the Chief Operating Officer of the company since March 2026.

Mr. Vahid Vahedi has been a Senior Vice President and the Chief Technology Officer of the company since March 2023. Prior to this, he served as the Senior Vice President and General Manager of Lam's etch business. Previously, he served as the Group Vice President of the etch product group of the company. Mr. Vahedi also served as the Vice President of Etch Business Product Management and Marketing, Vice President of Dielectric Etch, Vice President of Conductor and 3DIC Etch, and Director of Conductor Etch Technology Development at the company.

Ms. Ava Harter has been a Senior Vice President and the Chief Legal Officer of the company since July 2024. Prior to this, she served as Executive Vice President and Chief Legal Officer at Whirlpool Corporation. Previously, she served as General Counsel at Owens and various roles at General Electric and Dow Chemical. Earlier, she served at the law firms of Jones Day and Thomspon Hine.