Lam Research Corp - Company Profile

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Lam Research Corp: Patents

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View up-to-date information on Lam Research Corp patents, including inventor and filing insights.

Patent Trends

Publication Identifier Document Type Title Classification-CPC Publication Date
US20230395410A1 Application Auto-calibration to a station of a process module that spins a wafer H01J2237/334; H01J37/32724; H01L21/67161; H01L21/67201; H01L21/67248; H01L21/67253; H01L21/67259; H01L21/67742; H01L21/67748; H01L21/68; H01L21/681; H01L21/6831; H01L21/68742; H01L21/68764; H01L21/68771; H01L22/20 December 07, 2023
US20230395359A1 Application Cold edge low temperature electrostatic chuck H01J37/32724; H01L21/67103; H01L21/67109; H01L21/67248; H01L21/6833; H01L21/68735; H01L21/68785 December 07, 2023
EP4286560A1 Application Oberflächenbehandlung für eine chemische und/oder elektrolytische oberflächenbehandlung eines substrats C25D17/00; C25D17/001; C25D21/10; C25D5/08; C25D7/12 December 06, 2023
US11837446B2 Grant High power cable for heated components in rf environment H01B9/00; H01B9/006; H01J2237/2001; H01J37/32577; H01J37/32642; H01J37/32724; H01L21/67103; H01L21/683; H01L21/6833; H03H7/01 December 05, 2023
US11837443B2 Grant Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression H01J37/3244 December 05, 2023
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Top Inventors by Filings (Count by publication)

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