View up-to-date information on Nova Ltd patents, including inventor and filing insights.
Patent Trends
| Publication Identifier | Document Type | Title | Classification-CPC | Publication Date |
|---|---|---|---|---|
| US11430647B2 | Grant | Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry | G01N23/22; G01N23/2258; G01Q10/04; H01J2237/2516; H01J49/126; H01J49/142; H01J49/26; H01L22/12 | August 30, 2022 |
| US20220223395A1 | Application | MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME | G01T1/2006; G01T1/208; G01T1/28; G01T1/2928; H01J2237/2445; H01J49/025; H01J49/06 | July 14, 2022 |
| TW202223333A | Application | Integrated measurement system | G01B11/02; G01B11/24; G01B2210/56; G01B5/0004; G01N2033/0003; G01N2033/0078; G01N2033/0095; G01N21/8806; G01N21/9501; G01N21/956 | June 16, 2022 |
| US11346795B2 | Grant | XPS metrology for process control in selective deposition | C23C16/06; C23C16/24; C23C16/45529; C23C16/52; G01N23/2273; H01L21/67253 | May 31, 2022 |
| TWI765688B | Grant | METHOD AND RAMAN SPECTROSCOPY SYSTEM FOR USE IN MEASURING PATTERNED STRUCTURE | G01B11/0666; G01B2210/56; G01L1/00; G01L1/24; G01N21/01; G01N21/65; G01N21/658; G01N21/9501; G03F7/70625; H01L22/12 | May 21, 2022 |
Top Inventors by Filings (Count by publication)
| Name | Count |
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